UHP Bulk Gas Regulator - High Flow - BFR5K Series

Артикул

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Бренд

Parker

Цена

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Описание

Краткое описание: The BFR5K Series regulator is a compact, high flow, high performance Bulk Gas regulator designed for semiconductor processing.
Материал корпуса: VeriClean 316L Stainless Steel
Материал тарельчатого клапана: VeriClean 316L Stainless Steel
Материал седла: PCTFE
Материал уплотнительного кольца: Fluorcarbon (std), Ethylene Propylene
Материал сильфона: Inconel 718 (Inner), 321 Stainless Steel (Outer)
Материал крышки: Nickel Plated Brass
Расход: Cv: 4.5
Интенсивность внутренних утечек: Bubble Tight
Объем: 71 (without connections) cm3
Вес: 5.7 (Dome Loaded), 7.7 (Manual) lb, 2.6 (Dome Loaded), 3.5 (Manual) kg
Максимальное расчетное давление на входе: 500 psig
Расчетное давление на выходе: 0-60 psig, 0-100 psig, 0-150 psig,0-200 psig (Manual) 0-200 psig (Dome Loaded)
Максимальная рабочая температура: 66 °C, 150 °F
Минимальная рабочая температура: -40 °C, -40 °F
The BFR5K Series regulator is a compact, high flow, high performance Bulk Gas regulator designed for semiconductor processing. The BFR5K provides a stable outlet pressure over a wide variety of conditions with flow rates as high as 5000 slpm. The unique balanced poppet design allows the regulator to maintain the outlet pressure setting regardless of changes in the upstream pressure. 316L Stainless Steel Poppet and 321 Stainless Steel Bellows. High flow capacity. Tied diaphragm to poppet for added safety. Balanced poppet design reduces supply pressure effect. Capable of operating at a wide range of flows from 100 up to 5,000 slpm. Compatibility with semiconductor bulk gases. No spring in wetted area. Standard full internal electropolish.